AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation
Category: News
Jul 27
Ovenized SEM
Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/ovenized-sem/
Jul 27
Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/ovenized-sem/