January 2015 archive

Graphene-Aluminum Nitride NEMS Resonator

Permanent link to this article: https://web.northeastern.edu/nemslab/2015/01/graphene-aluminum-nitride-nems-resonator/

Graphene electrode for piezoelectric NEMS resonators

Schematic illustration in layers view of a contour-extensional mode AlN NEMS resonator, where the top electrode is fabricated using a single-atomic-layer graphene sheet.

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Permanent link to this article: https://web.northeastern.edu/nemslab/2015/01/graphene-electrode-for-piezoelectric-nems-resonators/