January 2015 archive
Permanent link to this article: https://web.northeastern.edu/nemslab/2015/01/graphene-aluminum-nitride-nems-resonator/
Jan 30
Graphene electrode for piezoelectric NEMS resonators
Schematic illustration in layers view of a contour-extensional mode AlN NEMS resonator, where the top electrode is fabricated using a single-atomic-layer graphene sheet.
Permanent link to this article: https://web.northeastern.edu/nemslab/2015/01/graphene-electrode-for-piezoelectric-nems-resonators/