Aug 30

August 10, 2011

The paper A. Tazzoli, M. Rinaldi and G. Piazza, “Ovenized High Frequency Oscillators Based on Aluminum Nitride Contour-Mode MEMS Resonators”, has been accepted for presentation at the IEEE International Electron Devices Meeting 2011 (IEDM 2011), Washington, USA, December 5-7, 2011.

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/08/post2/

Jul 27

Ovenized SEM

AlN MEMS Resonator with integrated Nano-Hot-Plate for temperature controlled operation

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/ovenized-sem/

Jul 27

CMR SWNT

AlN Nano Plate Resonator with integrated Carbon Nanotube Forest
Read the papers for details:

M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza, “Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-Mode MEMS Resonators“, Proceedings of the IEEE International Frequency Control Symposium 2008, Honolulu, Hawaii, USA, 18-21 May 2008, pg, 443-448.

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/cmr-swnt/

Jul 27

Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout

Read the papers for more details:

M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pg. 2666-2670. Download Here

M. Rinaldi, C. Zuniga and G. Piazza, “ss-DNA Functionalized Array of AlN Contour-Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb Detection of Volatile Organic Chemicals“, Proceedings of the 24th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011, pg. 976-979.

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/sensor-array/

Jul 27

10GHz Resonator

10 GHz AlN Nano Plate Resonator
Read the paper for details:

M. Rinaldi, C. Zuniga, and G. Piazza, “5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators”, Proceedings of the 22nd IEEE Conference on Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg. 916-919. Download Here

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/10ghz-resnator/