Feb 20

February 20, 2012

The paper M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli and G. Piazza, “High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation “, has been accepted for presentation at the IEEE International Frequency Control Symposium 2012 (IFCS 2012), Baltimore, USA, 21-24 May 2012.

Permanent link to this article: https://web.northeastern.edu/nemslab/2012/02/february-20-2012/