Oct 30

October 21, 2011

The paper M. Rinaldi, A. Tazzoli, J. Segovia-Fernandez, V. Felmetsger and G. Piazza, “High Power and Low Temperature Coefficient of Frequency Oscillator Based on a Fully Anchored and Oxide Compensated AlN Contour-Mode MEMS Resonator”, has been accepted for presentation at the IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, January 29- February 2, 2012.

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/10/post1/

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