Jul 27

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Sensor Array

AlN Nano Plate Resonant Sensor Array and CMOS Electronic Readout

Read the papers for more details:

M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, “Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode NEMS Resonant Sensors”, Proceedings of the IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pg. 2666-2670. Download Here

M. Rinaldi, C. Zuniga and G. Piazza, ss-DNA Functionalized Array of AlN Contour-Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb Detection of Volatile Organic Chemicals, Proceedings of the 24th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011, pg. 976-979.

Permanent link to this article: https://web.northeastern.edu/nemslab/2011/07/sensor-array/